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Excimer Laser Performance under Various Microwave Excitation Conditions.
Klingenberg, H. H. and Gekat, F. (1991) Excimer Laser Performance under Various Microwave Excitation Conditions. In: SPIE-Proceedings 1503, pp. 140-145. SPIE, Bellingham, USA.. The International Congress on Optical Science and Engineering - ECOA - The Hague, 15 March 1991..
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| Document Type: | Conference or Workshop Item (Paper) | ||||||
|---|---|---|---|---|---|---|---|
| Additional Information: | LIDO-Berichtsjahr=1991, pages=6, | ||||||
| Title: | Excimer Laser Performance under Various Microwave Excitation Conditions. | ||||||
| Authors: |
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| Date: | 1991 | ||||||
| Journal or Publication Title: | SPIE-Proceedings 1503 | ||||||
| Page Range: | pp. 140-145 | ||||||
| Publisher: | SPIE, Bellingham, USA. | ||||||
| Status: | Published | ||||||
| Keywords: | Excimer Laser | ||||||
| Event Title: | The International Congress on Optical Science and Engineering - ECOA - The Hague, 15 March 1991. | ||||||
| HGF - Research field: | UNSPECIFIED | ||||||
| HGF - Program: | no assignment | ||||||
| HGF - Program Themes: | no assignment | ||||||
| DLR - Research area: | UNSPECIFIED | ||||||
| DLR - Program: | no assignment | ||||||
| DLR - Research theme (Project): | L - Laser Research and Technology | ||||||
| Location: | Stuttgart | ||||||
| Institutes and Institutions: | Institute of Technical Physics | ||||||
| Deposited By: | elib DLR-Beauftragter | ||||||
| Deposited On: | 02 Apr 2006 | ||||||
| Last Modified: | 27 Apr 2009 05:44 |
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