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Complex Semiconductor Compound Targets for Pulsed Laser Deposition

Dittrich, H. and Klose, M. and Brieger, M. and Schäffler, R. and Schock, H.W. (1995) Complex Semiconductor Compound Targets for Pulsed Laser Deposition. In: Semiconductor Processing and Characterization with Lasers, 173-174, pp. 129-134. Transtech Publication, Aedermannsdorf, CH. Semiconductor Processing and Characterization with Lasers - Applications in Photovoltaics -, Suttgart, Germany, April 18-20, 1994. ISBN 0-87849-683-1.

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Document Type:Conference or Workshop Item (Paper)
Additional Information: LIDO-Berichtsjahr=2002, monograph_id=nicht bekannt,
Title:Complex Semiconductor Compound Targets for Pulsed Laser Deposition
Authors:
AuthorsInstitution or Email of Authors
Dittrich, H.UNSPECIFIED
Klose, M.UNSPECIFIED
Brieger, M.UNSPECIFIED
Schäffler, R.UNSPECIFIED
Schock, H.W.UNSPECIFIED
Date:1995
Journal or Publication Title:Semiconductor Processing and Characterization with Lasers
Volume:173-174
Page Range:pp. 129-134
Editors:
EditorsEmail
M. Brieger et al., UNSPECIFIED
Publisher:Transtech Publication, Aedermannsdorf, CH
Series Name:Material Science Forum
ISBN:0-87849-683-1
Status:Published
Event Title:Semiconductor Processing and Characterization with Lasers - Applications in Photovoltaics -, Suttgart, Germany, April 18-20, 1994
Organizer:DLR: Institute of Technical Physics; Stuttgart University: Institute of Physical Electronics, Institute of Beam Tools; Max-Planck-Institute of Solid State Research
HGF - Research field:Energy
HGF - Program:Aeronautics
HGF - Program Themes:other
DLR - Research area:Energy
DLR - Program:L - no assignement
DLR - Research theme (Project):L - Laser Research and Technology
Location: Stuttgart
Institutes and Institutions:Institute of Technical Physics
Deposited By: elib DLR-Beauftragter
Deposited On:16 Sep 2005
Last Modified:06 Jan 2010 14:45

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