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Relaxed Si0.7Ge0.3 buffer layers grown on patterned silicon substrates for SiGe n-channel HMOSFETs
Wöhl, G. and Dudek, V. and Graf, M. and Kibbel, H. and Herzog, H.-J. and Klose, M. (2000) Relaxed Si0.7Ge0.3 buffer layers grown on patterned silicon substrates for SiGe n-channel HMOSFETs. Thin Solid Films, 369, pp. 175-181.
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| Document Type: | Article | ||||||||||||||
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| Additional Information: | LIDO-Berichtsjahr=2001, | ||||||||||||||
| Title: | Relaxed Si0.7Ge0.3 buffer layers grown on patterned silicon substrates for SiGe n-channel HMOSFETs | ||||||||||||||
| Authors: |
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| Date: | 2000 | ||||||||||||||
| Journal or Publication Title: | Thin Solid Films | ||||||||||||||
| Refereed publication: | No | ||||||||||||||
| In SCOPUS: | No | ||||||||||||||
| In ISI Web of Science: | No | ||||||||||||||
| Volume: | 369 | ||||||||||||||
| Page Range: | pp. 175-181 | ||||||||||||||
| Status: | Published | ||||||||||||||
| HGF - Research field: | Energy | ||||||||||||||
| HGF - Program: | Aeronautics | ||||||||||||||
| HGF - Program Themes: | L - no assignement | ||||||||||||||
| DLR - Research area: | Energy | ||||||||||||||
| DLR - Program: | L - no assignement | ||||||||||||||
| DLR - Research theme (Project): | L - Laser Research and Technology | ||||||||||||||
| Location: | Stuttgart | ||||||||||||||
| Institutes and Institutions: | Institute of Technical Physics | ||||||||||||||
| Deposited By: | elib DLR-Beauftragter | ||||||||||||||
| Deposited On: | 16 Sep 2005 | ||||||||||||||
| Last Modified: | 06 Jan 2010 14:40 |
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