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Single-shot, high repetition rate metallic pattern transfer

Bähnisch, R. and Groß, W. and Menschig, A. (2000) Single-shot, high repetition rate metallic pattern transfer. Microelectronic Engineering, 50, pp. 541-546.

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Document Type:Article
Additional Information: LIDO-Berichtsjahr=2000,
Title:Single-shot, high repetition rate metallic pattern transfer
Authors:
AuthorsInstitution or Email of Authors
Bähnisch, R.UNSPECIFIED
Groß, W.UNSPECIFIED
Menschig, A.UNSPECIFIED
Date:2000
Journal or Publication Title:Microelectronic Engineering
Refereed publication:Yes
In ISI Web of Science:Yes
Volume:50
Page Range:pp. 541-546
Status:Published
HGF - Research field:Energy
HGF - Program:Aeronautics
HGF - Program Themes:other
DLR - Research area:Energy
DLR - Program:L - no assignement
DLR - Research theme (Project):L - Laser Research and Technology
Location: Stuttgart
Institutes and Institutions:Institute of Technical Physics
Deposited By: elib DLR-Beauftragter
Deposited On:16 Sep 2005
Last Modified:06 Jan 2010 14:39

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