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Flexible design concept and fabrication technology for microsystems

Bähnisch, R. and Groß, W. and Menschig, A. (1999) Flexible design concept and fabrication technology for microsystems. In: precision engineering nanotechnology, Vol. 1, pp. 506-509. Shaker Verlag, Aachen. 1st euspen conference, Bremen, 31 May - 04 June 1999. ISBN 3-8265-6085-X.

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Document Type:Conference or Workshop Item (Paper)
Additional Information: LIDO-Berichtsjahr=1999,
Title:Flexible design concept and fabrication technology for microsystems
Authors:
AuthorsInstitution or Email of Authors
Bähnisch, R.UNSPECIFIED
Groß, W.UNSPECIFIED
Menschig, A.UNSPECIFIED
Date:1999
Journal or Publication Title:precision engineering nanotechnology
Volume:Vol. 1
Page Range:pp. 506-509
Editors:
EditorsEmail
McKeown, P.UNSPECIFIED
Corbett, J.UNSPECIFIED
Bonis, M.UNSPECIFIED
Sartori, S.UNSPECIFIED
Kunzmann, H.UNSPECIFIED
Wieck, M.UNSPECIFIED
Brinksmeier, E.UNSPECIFIED
Preuß, W.UNSPECIFIED
Riemer, O.UNSPECIFIED
Publisher:Shaker Verlag, Aachen
ISBN:3-8265-6085-X
Status:Published
Keywords:Femtosecond laser, design concept
Event Title:1st euspen conference, Bremen, 31 May - 04 June 1999
Organizer:European Society for Precision Engineering
HGF - Research field:Energy
HGF - Program:Aeronautics
HGF - Program Themes:other
DLR - Research area:Energy
DLR - Program:L - no assignement
DLR - Research theme (Project):L - Laser Research and Technology
Location: Stuttgart
Institutes and Institutions:Institute of Technical Physics
Deposited By: elib DLR-Beauftragter
Deposited On:16 Sep 2005
Last Modified:06 Jan 2010 14:37

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