Flexible design concept and fabrication technology for microsystems

Bähnisch, R. and Groß, W. and Menschig, A. (1999) Flexible design concept and fabrication technology for microsystems. In: precision engineering nanotechnology, Vol. 1, pp. 506-509. Shaker Verlag, Aachen. 1st euspen conference, Bremen, 31 May - 04 June 1999. ISBN 3-8265-6085-X.

Full text not available from this repository.

Document Type:

Conference or Workshop Item (Paper)

Additional Information:

LIDO-Berichtsjahr=1999,

Title:

Flexible design concept and fabrication technology for microsystems

Authors:

Authors	Institution or Email of Authors
Bähnisch, R.
Groß, W.
Menschig, A.

Date:

1999

Journal or Publication Title:

precision engineering nanotechnology

Volume:

Vol. 1

Page Range:

pp. 506-509

Editors:

Editors	Email
McKeown, P.
Corbett, J.
Bonis, M.
Sartori, S.
Kunzmann, H.
Wieck, M.
Brinksmeier, E.
Preuß, W.
Riemer, O.

Publisher:

Shaker Verlag, Aachen

ISBN:

3-8265-6085-X

Status:

Published

Keywords:

Femtosecond laser, design concept

Event Title:

1st euspen conference, Bremen, 31 May - 04 June 1999

Organizer:

European Society for Precision Engineering

HGF - Research field:

Energy

HGF - Program:

Aeronautics

HGF - Program Themes:

L - no assignement

DLR - Research area:

Energy

DLR - Program:

L - no assignement

DLR - Research theme (Project):

L - Laser Research and Technology

Location:

Stuttgart

Institutes and Institutions:

Institute of Technical Physics

Deposited By:

elib DLR-Beauftragter

Deposited On:

16 Sep 2005

Last Modified:

06 Jan 2010 14:37

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