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Do, H. T. und Thieme, G. und Fröhlich, M. und Kersten, H. und Hippler, R. (2005) Ion Molecule and Dust Particle Formation in Ar/CH<sub>4</sub>, Ar/C<sub>2</sub>H<sub>2</sub> and Ar/C<sub>3</sub>H<sub>6</sub> radio-frequency plasmas. Contributed Plasma Physics, 45 (No. 5-6), Seiten 378-384. WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. doi: 10.1002/ctpp.200510041.
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Kurzfassung
Molecule and particle formation in a capacitively coupled radio-frequency discharge has been investigated by means of plasma process monitoring employing energy-dispersive mass spectrometry. Particle growth has been studied by recording the intensity of the transmitted and scattered laser signal from the particle cloud. An oscillation of the transmitted laser intensity was observed which is caused by periodic formation and expansion of acentral void. This behaviour can be explained by multi-generation dust cloud formation.
| elib-URL des Eintrags: | https://elib.dlr.de/20327/ | ||||||||||||||||||||||||
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| Dokumentart: | Zeitschriftenbeitrag | ||||||||||||||||||||||||
| Titel: | Ion Molecule and Dust Particle Formation in Ar/CH<sub>4</sub>, Ar/C<sub>2</sub>H<sub>2</sub> and Ar/C<sub>3</sub>H<sub>6</sub> radio-frequency plasmas | ||||||||||||||||||||||||
| Autoren: |
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| Datum: | 29 Juli 2005 | ||||||||||||||||||||||||
| Erschienen in: | Contributed Plasma Physics | ||||||||||||||||||||||||
| Referierte Publikation: | Ja | ||||||||||||||||||||||||
| Open Access: | Nein | ||||||||||||||||||||||||
| Gold Open Access: | Nein | ||||||||||||||||||||||||
| In SCOPUS: | Nein | ||||||||||||||||||||||||
| In ISI Web of Science: | Ja | ||||||||||||||||||||||||
| Band: | 45 | ||||||||||||||||||||||||
| DOI: | 10.1002/ctpp.200510041 | ||||||||||||||||||||||||
| Seitenbereich: | Seiten 378-384 | ||||||||||||||||||||||||
| Verlag: | WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim | ||||||||||||||||||||||||
| Status: | veröffentlicht | ||||||||||||||||||||||||
| Stichwörter: | dust particles, plasma, molecular ions | ||||||||||||||||||||||||
| HGF - Forschungsbereich: | Verkehr und Weltraum (alt) | ||||||||||||||||||||||||
| HGF - Programm: | Luftfahrt | ||||||||||||||||||||||||
| HGF - Programmthema: | Antriebe (alt) | ||||||||||||||||||||||||
| DLR - Schwerpunkt: | Luftfahrt | ||||||||||||||||||||||||
| DLR - Forschungsgebiet: | L ER - Antriebsforschung | ||||||||||||||||||||||||
| DLR - Teilgebiet (Projekt, Vorhaben): | L - Turbinentechnologien (alt) | ||||||||||||||||||||||||
| Standort: | Köln-Porz | ||||||||||||||||||||||||
| Institute & Einrichtungen: | Institut für Werkstoff-Forschung > Hochtemperatur-und Funktionsschutzschichten | ||||||||||||||||||||||||
| Hinterlegt von: | Fröhlich, Maik | ||||||||||||||||||||||||
| Hinterlegt am: | 04 Sep 2007 | ||||||||||||||||||||||||
| Letzte Änderung: | 27 Apr 2009 04:46 |
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